Ultra-thin Super High Frequency two-port ALN contour-mode resonators and filters

Author:

Rinaldi M.,Zuniga C.,Zuo C.,Piazza G.

Publisher

IEEE

Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Piezoelectric Microacoustic Metamaterial Filters;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2024-09

2. Development of Thick Sc0.2Al0.8N Film for MEMS Application;2023 IEEE 25th Electronics Packaging Technology Conference (EPTC);2023-12-05

3. Five Low-Noise Stable Oscillators Referenced to the Same Multimode AlN/Si MEMS Resonator;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

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5. Piezoelectric Lateral-Extensional Mode Resonators With Reconfigurable Electrode and Resonance Mode-Switching Behavior Enabled by a VO₂ Thin-Film;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2022-08

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