Author:
Melamud R.,Hoperoft M.,Jha C.,Bongsang Kim ,Chandorkar S.,Candler R.,Kenny T.W.
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. 4H-SiC Beam Resonators with Tailored Local Zero TCF;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Reliability Study of MEMS Resonator: A Review;Journal of Physics: Conference Series;2022-08-01
3. Temperature Sensitivity of Angular Gain in Micro Rate-Integrating Gyroscopes (Mrig);2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09
4. Linear and Nonlinear Mechanics in MEMS;Silicon Sensors and Actuators;2021-07-26
5. A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor;Micromachines;2019-08-29