Numerical simulation and experimental study on the influence of RF frequency on characteristics in inductively coupled plasma
Author:
Affiliation:
1. Institute of Plasma Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences,Hefei,China
2. Institute of Energy of Hefei Comprehensive National Science Center,Hefei,China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx8/10625766/10625775/10626415.pdf?arnumber=10626415
Reference5 articles.
1. Simulation investigation of inductively coupled plasma generator for atmosphere-breathing electric propulsion system
2. Effects of the Nonequilibrium Model and the Discharge Frequency on an Argon Inductively Coupled Plasma Simulation
3. Surface modifications of polystyrene and their stability: A comparison of DBD plasma deposition and direct fluorination
4. Numerical Study on Influence of Operating Frequency and Plasma Torch Structure on Characteristics of Radio-frequency-inductive Coupled Plasma;Chen;High Volt. Eng,2019
5. Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H2 Inductively Coupled Thermal Plasma
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