Precise Grating Profile Evaluation for DFB Lasers Using an Optical Metrology
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Published:2007-08
Issue:3
Volume:20
Page:293-298
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ISSN:0894-6507
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Container-title:IEEE Transactions on Semiconductor Manufacturing
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language:
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Short-container-title:IEEE Trans. Semicond. Manufact.
Author:
Muroya Yoshiharu,Makino Shingo,Umeda Naoki,Okuda Tetsuro,Ishikawa Shin,Komatsu Keiro
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials