Sensitivity Improvement of a 2D MEMS Thermal Wind Sensor for Low-Power Applications

Author:

Zhu Yanqing,Qin Ming,Huang Jianqiu,Yi Zhenxiang,Huang Qing-An

Funder

Fundamental Research Funds for the Central Universities and the Innovation Project for Graduate Student of Jiangsu Province

Scholarship of China Scholarship Council

High-Tech Research and Development of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

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