Analytical Modeling, Simulation, and Fabrication of a MEMS Rectangular Paddle Piezo-Resistive Micro-Cantilever-Based Wind Speed Sensor
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/8444483/08421617.pdf?arnumber=8421617
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Analytical modeling and numerical investigation of a variable width piezoresistive multilayer polymer micro-cantilever air flow sensor;Advances in Materials and Processing Technologies;2022-05-22
2. Design of an array of piezoresistive airflow sensors based on pressure loading mode for simultaneous detection of airflow velocity and direction;Review of Scientific Instruments;2022-02-01
3. Design and Optimization of Resonant Cavity Piezoelectric Cantilever Sensor for Wind Velocity and Direction Measurement;IEEE Transactions on Instrumentation and Measurement;2022
4. Nanophotonic Crystal Waveguide With Embedded Piezoresistor on MEMS Cantilever for Sensing Application;IEEE Sensors Journal;2021-06-15
5. An Approach to Design a Wireless Air Flow Transmitter Using Flex Sensor;IEEE Sensors Journal;2021-05-01
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