Correction on “Effect of Temperature Variation and Packaging on SOI MEMS Inductor With DRIE Trench on Low-Resistivity Substrate” [Feb 14 400-407]
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Published:2015-01
Issue:1
Volume:62
Page:236-236
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ISSN:0018-9383
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Container-title:IEEE Transactions on Electron Devices
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language:
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Short-container-title:IEEE Trans. Electron Devices
Author:
Bhattacharya Anirban,Bhattacharyya Tarun Kanti
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials