Thermal Reliability Tests of Air-Gap TSVs With Combined Air-SiO2Liners
-
Published:2016-05
Issue:5
Volume:6
Page:703-711
-
ISSN:2156-3950
-
Container-title:IEEE Transactions on Components, Packaging and Manufacturing Technology
-
language:
-
Short-container-title:IEEE Trans. Compon., Packag. Manufact. Technol.
Author:
Huang Cui,Wu Dong,Wang Zheyao
Funder
973 Program
Beijing Municipal Science and Technology Project
National Natural Science Foundation of China
Tsinghua University Initiative Scientific Research
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献