Electro-Thermal Reliability Analysis of Electromigration in 3-D TSV-RDL Interconnects

Author:

Zhang Yiming1ORCID,Tian Wenchao2,Wang Hongyue1ORCID,Zhang Xiaowen1,Shao Weiheng1ORCID,Zhou Bin1,Shi Yijun1,Gong Weixi1,Deng Rui1,Zhao Jianguo3,Wang Pan3,Feng Yang3

Affiliation:

1. Department of Science and Technology on Reliability Physics and Application of Electronic Component Laboratory China Electronic Product Reliability and Environmental Testing, CEPERI, Guangzhou, Guangdong, China

2. Department of School of Electro-Mechanical Engineering, Xidian University, Xi’an, Shaanxi, China

3. Micro-Electronics Center of Chongqing United Micro-Electronics Center (CUMEC), Chongqing, China

Funder

Basic and applied basic research fund project of Guangdong Province

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Electronic, Optical and Magnetic Materials

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