Assessment of possibilities to improve the efficiency of low-temperature plasma modification of the surface layer of metal products
Author:
Affiliation:
1. Mechanisms Theory & Machines Structure Lab of Mechanical Engineering Research Institute of the Russian Academy of Sciences (IMASH RAN),Moscow,Russia
Funder
Russian Science Foundation
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10290133/10290150/10290310.pdf?arnumber=10290310
Reference13 articles.
1. Three pillars of plasma cleaning;korochkin,0
2. Creation of gas mixtures for ion-plasma technologies;sysoev;East European Journal of Advanced Technologies,2014
3. Plasma cleaning technology for microassembly;simonov;Printed assembly,2016
4. Influence of argon on the structure and properties of Ti-Si-N-coatings obtained by vacuum-arc deposition in a nitrogen + argon gas mixture;belous;Atomic Science and Technology Issues,2012
5. The results of the correlation analysis of the relationship between indicators characterizing the surface layer properties and signals reflecting the process of low-temperature plasma treatment of metal products
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