Study of low-temperature plasma gas discharge
Author:
Affiliation:
1. Mechanisms Theory & Machines Structure Lab of Mechanical Engineering Research Institute of the Russian Academy of Sciences (IMASH RAN),Moscow,Russia
Funder
Russian Science Foundation
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10290133/10290150/10290158.pdf?arnumber=10290158
Reference7 articles.
1. High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructures etching;farenik;Physical surface engineering,2004
2. Theory of the negative anode drop in low-pressure discharges
3. The effect of a combined low-pressure gas discharge on metal surfaces
4. Theoretical Physics: Mechanics;landau,1988
5. Numerical simulation of the anode region of a high-current vacuum-arc discharge and the Bohm criterion
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