Application of SIMOX Technology for Parametric Correction of Resonant MEMS-Reference-Cited by-同舟云学术

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Application of SIMOX Technology for Parametric Correction of Resonant MEMS

Published:2022-05-30 Issue: Volume: Page:
ISSN:
Container-title:2022 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF)
language:
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Author:

Filonov O. M.¹,Okin P. A.¹

Affiliation:

1. Saint-Petersburg State University of Aerospace Instrumentation,Saint-Petersburg,Russia

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9803297/9803052/09803804.pdf?arnumber=9803804

Reference15 articles.

1. MEMS resonator tuning using focused ion beam platinum deposition;enderling,2004

2. Characterization of selective polysilicon deposition for mems resonator tuning

3. SIMOX (EMIS Processing);anc,2004

4. Method of calculation of the effective elastic modulus of beam microresonators at their submicron characteristic dimensions;bestugin;Natural and Technical Sciences,2018

5. Mechanics of materials;timoshenko;CL Engineering,1996

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