Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering
Cited by
3 articles.
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1. Study of the NF3 plasma cleaning of reactors for amorphous silicon deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-05
2. Microelectronics — Semiconductor Technology;Introduction to the Electronic Properties of Materials;1994
3. Detectors and Generators of Electromagnetic Radiation;Introduction to Applied Solid State Physics;1990