Modeling Sampling Strategy Optimization by Machine Learning Based Analysis-Reference-Cited by-同舟云学术

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Modeling Sampling Strategy Optimization by Machine Learning Based Analysis

Published:2021-12-12 Issue: Volume: Page:
ISSN:
Container-title:2021 International Workshop on Advanced Patterning Solutions (IWAPS)
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Author:

Zhang Wei,Pang Bo,Ma Yuansheng,Li Xiaomei,Bai Feng,Wang Yingfang

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9670881/9671056/09671235.pdf?arnumber=9671235

Reference7 articles.

1. Automatic clustering of eye gaze data for machine learning

2. Improvement of empirical OPC model robustness using full-chip aerial image analysis

3. Fast and accurate lithography simulation using cluster analysis in resist model building

4. Density Conscious Subspace Clustering for High-Dimensional Data

5. Toward standard process models for OPC

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Test Pattern Sampling Methodology for Model Tuning Efficiency and Robustness Improvement;2023 International Workshop on Advanced Patterning Solutions (IWAPS);2023-10-26

2. Test pattern generation by optimization of the feature space signature;38th European Mask and Lithography Conference (EMLC 2023);2023-10-05

3. SONR based layout decomposition and applications;2022 International Workshop on Advanced Patterning Solutions (IWAPS);2022-10-21

4. Integrated Test Pattern Extraction and Generation for Accurate Lithography Modeling;IEEE Transactions on Semiconductor Manufacturing;2022-08

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