Optical Millinewton Force Sensors Based on GaN Devices Integrated With Bionic-Structured PMDS Films
Author:
Affiliation:
1. School of Microelectronics, Southern University of Science and Technology, Shenzhen, China
2. College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, China
3. Peng Cheng Laboratory, Shenzhen, China
Funder
National Natural Science Foundation of China
Shenzhen Fundamental Research Program
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
http://xplorestaging.ieee.org/ielx7/16/10159202/10143726.pdf?arnumber=10143726
Reference34 articles.
1. Interferometric Fiber Optic Sensors
2. Design of a highly-birefringent microstructured photonic crystal fiber for pressure monitoring
3. Monolithic Integration of GaN-on-Sapphire Light-Emitting Diodes, Photodetectors, and Waveguides
4. A High-Sensitivity Fiber Bragg Grating-Based Distal Force Sensor for Laparoscopic Surgery
5. A Millinewton Resolution Fiber Bragg Grating-Based Catheter Two-Dimensional Distal Force Sensor for Cardiac Catheterization
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