Finite Element Simulation Analysis of Temperature Field of MEMS Gas Sensor Based on ANSYS Software-Reference-Cited by-同舟云学术

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Finite Element Simulation Analysis of Temperature Field of MEMS Gas Sensor Based on ANSYS Software

Published:2021-10 Issue: Volume: Page:
ISSN:
Container-title:2021 3rd International Conference on Artificial Intelligence and Advanced Manufacture (AIAM)
language:
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Author:

Li Xiaojuan¹,Yuan Yidong¹,Li Yabing¹,Liu Jinwen¹,Li Siqi¹,Liu Yu¹,Cheng Yan¹

Affiliation:

1. Beijing Smart Core Microelectronics Technology Co., Ltd,Beijing,China,102200

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9724649/9724654/09724767.pdf?arnumber=9724767

Reference5 articles.

1. Systematic design of micro-resistors for temperature control by quasi-simultaneous heating and temperature sensing

2. On the selectivity of nanostructured semiconductor gas sensors

3. A Monolithic Interface Circuit for Gas Sensor Arrays: Control and Measurement

4. Semiconducting metal oxide sensor array for the selective detection of combustion gases

5. Development of a micromachined hazardous gas sensor array

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