Copper Encapsulated Ultra-Thin NbN Films and Damascene Structures on 300 mm Si Wafers-Reference-Cited by-同舟云学术

Copper Encapsulated Ultra-Thin NbN Films and Damascene Structures on 300 mm Si Wafers

Published:2023-08 Issue:5 Volume:33 Page:1-5
ISSN:1051-8223
Container-title:IEEE Transactions on Applied Superconductivity
language:
Short-container-title:IEEE Trans. Appl. Supercond.

Author:

Kar Soumen¹^ORCID,Walker Harrison²^ORCID,Shah Archit²^ORCID,Frost Hunter³,Olson Stephen¹,Mucci John¹,Nalaskowski Jakub¹,Martinick Brian¹,Schujman Sandra¹^ORCID,Murray Thomas¹,Johnson Corbet S.¹,Wells Ilyssa¹,Bourque Ronald⁴,Pierce Stanley⁴,Bhatia Ekta¹^ORCID,Hamilton Michael C.²^ORCID,Rao Satyavolu S. Papa¹^ORCID

Affiliation:

1. New York Center for Research, Economic Advancement, Technology, Engineering and Science (NY CREATES), Albany, NY, USA

2. Alabama Micro/Nano Science and Technology Center, Department of Electrical and Computer Engineering, Auburn University, Auburn, AL, USA

3. College of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, NY, USA

4. TEL Technology Center, America (TTCA) LLC, Albany, NY, USA

Funder

TEL Technology Center America

LLC

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/77/10024526/10052722.pdf?arnumber=10052722

Reference17 articles.

1. Properties of reactively sputtered NbN films

2. Hotspot relaxation time of NbN superconducting nanowire single-photon detectors on various substrates

3. Development of NbN-based superconducting single photon detectors on silicon platform

4. Room temperature deposition of superconducting niobium nitride films by ion beam assisted sputtering

5. Fabrication of nanostructured superconducting single-photon detectors

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