Good High-Temperature Stability of $\hbox{TiN}/ \hbox{Al}_{2}\hbox{O}_{3}/\hbox{WN}/\hbox{TiN}$ Capacitors-Reference-Cited by-同舟云学术

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Good High-Temperature Stability of $\hbox{TiN}/ \hbox{Al}_{2}\hbox{O}_{3}/\hbox{WN}/\hbox{TiN}$ Capacitors

Published:2007-11 Issue:11 Volume:28 Page:954-956
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Pan Tung-Ming,Hsieh Chun-I,Huang Tsai-Yu,Yang Jian-Ron,Kuo Pin-Sun

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/55/4367538/04367569.pdf?arnumber=4367569

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