Null holographic test structures for the measurement of overlay and its statistical variation
-
Published:2000-05
Issue:2
Volume:13
Page:173-180
-
ISSN:0894-6507
-
Container-title:IEEE Transactions on Semiconductor Manufacturing
-
language:
-
Short-container-title:IEEE Trans. Semicond. Manufact.
Author:
AbuGhazaleh S.A.,Christie P.,Agrawal V.,Stevenson J.T.M.,Walton A.J.,Gundlach A.M.,Smith S.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials