Thermal Stability Improvement Induced by Laser Annealing for 50-Å Ni(Pt) Film Silicidation
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Published:2016-02
Issue:2
Volume:63
Page:751-754
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ISSN:0018-9383
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Container-title:IEEE Transactions on Electron Devices
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language:
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Short-container-title:IEEE Trans. Electron Devices
Author:
Zhang Jian-Chi,Jiang Yu-Long,Li Bing-Zong
Funder
Ministry of Science and Technology, China
National Natural Science Foundation of China
ZhuoXue plan
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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