Machine Learning Approaches for Process Optimization

Author:

Suzuki Yusuke,Iwashita Shinya,Sato Toshiki,Yonemichi Hitoshi,Moki Hironori,Moriya Tsuyoshi

Publisher

IEEE

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Autonomous hybrid optimization of a SiO2 plasma etching mechanism;Journal of Vacuum Science & Technology A;2024-06-28

2. Real-World Applications of Data Analytics, Big Data, and Machine Learning;Studies in Big Data;2024

3. 2022 Review of Data-Driven Plasma Science;IEEE Transactions on Plasma Science;2023-07

4. Effect of initial-learning dataset on etching profile optimization using machine learning in plasma etching;Japanese Journal of Applied Physics;2023-06-09

5. A Review : Classification and Detection Of Plants Diseases Using Machine Learning And Soft Computing Techniques;2022 4th International Conference on Artificial Intelligence and Speech Technology (AIST);2022-12-09

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