A comparison of unified vs. segregated automated material handling systems for 300 mm fabs
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Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/7623/20785/00962901.pdf?arnumber=962901
Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Q(λ) learning-based dynamic route guidance algorithm for overhead hoist transport systems in semiconductor fabs;International Journal of Production Research;2019-05-19
2. Lifter assignment problem for inter-line transfers in semiconductor manufacturing facilities;The International Journal of Advanced Manufacturing Technology;2016-01-09
3. Multiple-objective scheduling for interbay AMHS by using genetic-programming-based composite dispatching rules generator;Computers in Industry;2013-08
4. Dynamic dispatching for interbay material handling by using modified Hungarian algorithm and fuzzy-logic-based control;The International Journal of Advanced Manufacturing Technology;2013-01-29
5. The use of a simulation, a hybrid Taguchi, and dual response surface methods in the automated material handling system tool-to-tool strategy for a 300-mm fab;European J. of Industrial Engineering;2012
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