Low cost and short lead time AMHS design using interbay/intrabay diverging and converging IMP method for 300 mm fab-Reference-Cited by-同舟云学术

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Low cost and short lead time AMHS design using interbay/intrabay diverging and converging IMP method for 300 mm fab

Published: Issue: Volume: Page:
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Container-title:Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)
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Author:

Kurosaki R.,Shimura T.,Komada H.,Kojima T.,Watanabe Y.

Publisher

Ultra Clean Soc

Link

http://xplorestaging.ieee.org/ielx5/7795/21435/00993614.pdf?arnumber=993614

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Lifter assignment problem for inter-line transfers in semiconductor manufacturing facilities;The International Journal of Advanced Manufacturing Technology;2016-01-09

2. Modularized simulation for lot delivery time forecast in automatic material handling systems of 300 mm semiconductor manufacturing;The International Journal of Advanced Manufacturing Technology;2005-04-20

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