Increasing Ranging Accuracy of Aluminum Nitride Pmuts by Circuit Coupling-Reference-Cited by-同舟云学术

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Increasing Ranging Accuracy of Aluminum Nitride Pmuts by Circuit Coupling

Published:2021-01-25 Issue: Volume: Page:
ISSN:
Container-title:2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Cai Junxiang,Liu Kangfu,Lou Liang,Zhang Songsong,Gu Yuandong Alex,Wu Tao

Funder

Natural Science Foundation of Shanghai

National Science Foundation

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9375130/9375148/09375241.pdf?arnumber=9375241

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer;Micromachines;2024-03-30

2. Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers;IEEE Sensors Letters;2023-04

3. Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders;Micromachines;2023-02-02

4. Microwave-Induced Thermoacoustic Imaging Using Aluminum Nitride PMUT;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

5. Aluminum Nitride Thin Film Based Reconfigurable Integrated Photonic Devices;IEEE Journal of Selected Topics in Quantum Electronics;2023

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