Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation

Author:

Xi Jingqian1,Xu Jiao1,Zhang Ziqian1,Uka Erion2,Liu Huafeng1,Chen Jianlin3,Wang Chen4,Kraft Michael4,Mak Pui-In5,Wang Yuan5,Zhao Chun2

Affiliation:

1. Huazhong University of Science and Technology,MOE Key Laboratory of Fundamental Physical Quantities Measurement, PGMF and School of Physics,Wuhan,P. R. China,430074

2. University of York,School of Physics, Engineering and Technology,U. K.,YO10 5DD

3. Shanghai University,School of Microelectronics

4. University of Leuven,ESAT Department, MNS,Belgium

5. University of Macau,Institute of Microelectronics,P. R. China

Funder

Technology Development

Publisher

IEEE

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