Robust High-G Microaccelerometers with Mechanical Low-Pass Filters and Electrical ROIC
Author:
Affiliation:
1. Republic of Korea,Korea Advanced Institution of Science and Technology
2. Inha University,Republic of Korea
3. Agency for Defense Development,Republic of Korea
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10502028/10502030/10502092.pdf?arnumber=10502092
Reference9 articles.
1. A review of high-performance MEMS sensors for resource exploration and geophysical applications
2. Design of a three-axis high-g piezoresistive accelerometer
3. An Axial-beam Piezoresistive Accelerometer for High-performance Crash Detection of Automotive Industry
4. Vertical-plate-type microaccelerometer with high linearity and low cross-axis sensitivity
5. Acquisition and Analysis Technology of Pyroshock Response on Spacecraft
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