Bandwidth vs ZRO Stability Trade-Off in Lissajous Frequency Modulated MEMS Gyroscopes-Reference-Cited by-同舟云学术

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Bandwidth vs ZRO Stability Trade-Off in Lissajous Frequency Modulated MEMS Gyroscopes

Published:2023-03-28 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
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Author:

Bestetti Marco¹,Mussi Giorgio¹,Gattere Gabriele²,Padovani Christian¹,Bonfanti Andrea Giovanni¹,Langfelder Giacomo¹

Affiliation:

1. Informazione e Bioingegneria, Politecnico di Milano,Dipartimento di Elettronica,Milano,Italy

2. AMS R&D Group, ST Microelectronics, Cornaredo (MI),Italy

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10103931/10103798/10103804.pdf?arnumber=10103804

Reference10 articles.

1. Frequency Modulated Operation in a Silicon MEMS Gyroscope with Quatrefoil Suspension System

2. Silicon MEMS inertial sensors evolution over a quarter century

3. A System Phase Noise Model for Frequency-Modulated MEMS Gyroscopes

4. Chopped rate-to-digital FM gyroscope with 40ppm scale factor accuracy and 1.2dph bias

5. Fully Integrated, 406 $\mu$A, $\text{5 }^{\circ}$/hr, Full Digital Output Lissajous Frequency-Modulated Gyroscope

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Combining Lissajous Frequency Modulation With 250 nm Piezoresistive Sensing in MEMS Gyroscope: Theoretical Advantages and Practical Challenges;IEEE Sensors Letters;2023-11

2. Low-Motion Amplitude Operation of Lissajous Frequency Modulated MEMS Gyroscopes for Spurious Harmonics Reduction;IEEE Sensors Letters;2023-11

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