A Convolutional Neural Network for Fault Classification and Diagnosis in Semiconductor Manufacturing Processes-Reference-Cited by-同舟云学术

A Convolutional Neural Network for Fault Classification and Diagnosis in Semiconductor Manufacturing Processes

Published:2017-05 Issue:2 Volume:30 Page:135-142
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Lee Ki Bum,Cheon Sejune,Kim Chang Ouk^ORCID

Funder

Global Ph.D. Fellowship Program through the National Research Foundation of Korea (NRF)

Technology Innovation Program (Development of Big Data-Based Analysis and Control Platform for Semiconductor Manufacturing Plants) through the Ministry of Trade, Industry and Energy, South Korea

NRF through the Ministry of Science, ICT and Future Planning, South Korea

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/66/7918646/07867863.pdf?arnumber=7867863

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