Enhanced Plasma Uniformity in RF Plasma With Side Multihole
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Published:2014-10
Issue:10
Volume:42
Page:2766-2767
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ISSN:0093-3813
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Container-title:IEEE Transactions on Plasma Science
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language:
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Short-container-title:IEEE Trans. Plasma Sci.
Author:
Lee Hyo-Chang,Chung Chin-Wook
Funder
SRC
CRC
Basic Science Research Program
Research Foundation of Korea, Korean Government
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Condensed Matter Physics,Nuclear and High Energy Physics