Dual Discharge Modes Operation of an Argon Plasma Generated by Commercial Electronic Ballast for Remote Plasma Removal Process-Reference-Cited by-同舟云学术

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Dual Discharge Modes Operation of an Argon Plasma Generated by Commercial Electronic Ballast for Remote Plasma Removal Process

Published:2014-06 Issue:6 Volume:42 Page:1636-1639
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Cho Tae S.,Sen Yi-Heng,Bokka Ramesh,Park Soonam,Lubomirsky Dima,Venkataraman Shankar

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx7/27/6827265/06814921.pdf?arnumber=6814921

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Directional Microplasma Thruster Exhibiting a Switchable Intense Plasma Coupling;IEEE Access;2020

2. Comparison of sintering condition and radio frequency plasma discharge on the conversion of coal/biomass fly ash into high-temperature thermal energy storage material;Energy Conversion and Management;2019-07

3. Optimization of hollow cathode discharge electrode for damage free remote plasma removal process for semiconductor manufacturing;Japanese Journal of Applied Physics;2016-03-31

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