Author:
Shubaly M. R.,de Jong M. S.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Nuclear Energy and Engineering,Nuclear and High Energy Physics
Cited by
16 articles.
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1. A fast modulated duoPIGatron plasma source for the diagnostic beam injector of the Tokamak de Varennes;Plasma Sources Science and Technology;1996-11-01
2. Particle generation in ion implanters;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03
3. The MeV ion implantation system “RFQ-1000” and its applications;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
4. Modification of a 100-mA-class high-current oxygen implanter and its application to ultrathin film MOSFET/SIMOX;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
5. Ion sources for use in ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02