Carbon Nanotube Growth on the Polysilicon Layers of CMOS
Author:
Affiliation:
1. University of South-Eastern Norway,Department of Microsystems,Borre,Norway,3184
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10231127/10231154/10231182.pdf?arnumber=10231182
Reference14 articles.
1. From VHF to UHF CMOS-MEMS monolithically integrated resonators
2. Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis;roy;Microsyst Nanoeng,2023
3. CVD synthesis and radial deformations of large diameter single-walled CNTs
4. CMOS MEMS Fabrication Technologies and Devices
5. Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon N anotubes for Gas Sensing;roy;SENSORS,0
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