Deploying an integrated framework of fab-wide and toolset schedulers to improve performance in a real large-scale fab-Reference-Cited by-同舟云学术

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Deploying an integrated framework of fab-wide and toolset schedulers to improve performance in a real large-scale fab

Published:2023-05-01 Issue: Volume: Page:
ISSN:
Container-title:2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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Author:

Elaoud Semya¹,Xenos Dennis¹,O’Donnell Tina²

Affiliation:

1. Flexciton Ltd.,London,United Kingdom

2. Seagate Technology,Derry,United Kingdom

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10121052/10121025/10121116.pdf?arnumber=10121116

Reference6 articles.

1. Setting Daily Production Targets with Novel Approximation of Target Tracking Operations for Semi-conductor Manufacturing;kao;J Mfg Sys,2018

2. A global scheduling approach for cycle time control in complex manufacturing systems

3. Fab-Wide Scheduling of Semiconductor Plants: A Large-Scale Industrial Deployment Case Study

4. Multi-Objective Parallel Batch Scheduling In Wafer Fabs With Job Timelink Constraints

5. Simulation results and formalism for global-local scheduling in semiconductor manufacturing facilities

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Scheduling Semiconductor Manufacturing Operations in Research and Development Environments;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13

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