A Decade of Chasing the Origin of Nano-Whisker/Dendrite Defects from Reliability Qualification into Customer Returns
Author:
Affiliation:
1. Onsemi,Pocatello,ID,USA,83201
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10121052/10121025/10121080.pdf?arnumber=10121080
Reference10 articles.
1. Visualization and damage due to nano-dendrite defects in metal-insulator-metal capacitors;sheng;Proc of IRPS,2008
2. Reliability Assessment of Extrinsic Defects in Sinx Metal-Insulator-Metal Capacitors
3. Whiskers grown on aluminum thin films during heat treatments
4. Single mask metal-insulator-metal (MIM) capacitor with copper damascene metallization for sub-0.18?m mixed mode signal and system-on-a-chip (SoC) applications;liu;Proc of IEEE IITC,2000
5. A high reliability metal insulator metal capacitor for 0.18 μm copper technology
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