Author:
Barker Casey,Badowski Al,Whitefield Bruce,Levien Keith L.,Korestky Milo D.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. IC Circuits—Soul of Modern Society;Proceedings of the 2022 6th International Seminar on Education, Management and Social Sciences (ISEMSS 2022);2022
2. Temperature Distribution and Deposition Rate on Semiconductor Wafers in Low-Pressure CVD Equipment Processing Two Wafers;IEEE Transactions on Semiconductor Manufacturing;2013-11