Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

Published:1999 Issue:1 Volume:27 Page:70-71
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Czarnetzki U.,Hebner G.A.,Luggenholscher D.,Dobele H.F.,Riley M.E.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx5/27/16533/00763042.pdf?arnumber=763042

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Observation of the floating sheath distribution on Al2O3 and silicon targets adjacent to a DC biased metal substrate;Current Applied Physics;2024-05

2. Electric field determination in transient plasmas: in situ & non-invasive methods;Plasma Sources Science and Technology;2022-07-01

3. Wear trends of the 12.5 kW HERMeS Hall thruster;Journal of Applied Physics;2021-10-14

4. The ion kinetics at the wafer edge by the variation of geometry and permittivity of the focus ring in capacitively coupled discharges;Journal of Applied Physics;2019-12-21

5. Plasma interaction with emmissive surface with Debye-scale grooves;Plasma Sources Science and Technology;2018-04-05

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP