Coupling-of-modes analysis of thin film plate acoustic wave resonators utilizing the S0 Lamb mode
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation
Link
http://xplorestaging.ieee.org/ielx5/58/5442864/05442874.pdf?arnumber=5442874
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. An 8-inch commercial aluminum nitride MEMS platform for the co-existence of Lamb wave and film bulk acoustic wave resonators;Journal of Micromechanics and Microengineering;2023-03-16
2. Ultra-Large-Coupling and Spurious-Free SH0 Plate Acoustic Wave Resonators Based on Thin LiNbO3;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2020-02
3. Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications;Progress in Materials Science;2017-08
4. Dispersion of lamb waves under a periodic metal grating in aluminum nitride plates;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2014-09
5. Elucidating the origin of spurious modes in aluminum nitride microresonators using a 2-D finite-element model;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2014-05
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