Funder
Japan Society for the Promotion of Science (JSPS), Grant-in-Aid for Scientific Research
Japan Science and Technology Agency (JST) Core Research for Evolutional Science and Technology
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation
Cited by
3 articles.
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1. MEMS Cantilevered Energy Harvester with Tapered Thickness for Stress Control;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
2. Thickness Control of Cantilever Beam for Robust and High-Power Mems Energy Harvester;2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2022-12-12
3. Piezoelectric MEMS Energy Harvester from Airflow at Low Flow Velocities;Sensors and Materials;2022-05-24