Characteristics of Sputtered Lead Zirconate Titanate Thin Films With Different Layer Configurations and Large Thickness

Author:

Kanda KensukeORCID,Koyama TsukasaORCID,Yoshimura Takeshi,Murakami Shinichi,Maenaka Kazusuke

Funder

Japan Society for the Promotion of Science (JSPS), Grant-in-Aid for Scientific Research

Japan Science and Technology Agency (JST) Core Research for Evolutional Science and Technology

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

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