Lead Zirconate Titanate Nanoscale Patterning by Ultraviolet-Based Lithography Lift-Off Technique for Nano-Electromechanical System Applications-Reference-Cited by-同舟云学术

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Lead Zirconate Titanate Nanoscale Patterning by Ultraviolet-Based Lithography Lift-Off Technique for Nano-Electromechanical System Applications

Published:2012-09 Issue:9 Volume:59 Page:1955-1961
ISSN:0885-3010
Container-title:IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
language:
Short-container-title:IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

Author:

Guillon Samuel,Saya Daisuke,Mazenq Laurent,Costecalde Jean,ReMiens Denis,Soyer Caroline,Nicu Liviu

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Acoustics and Ultrasonics,Instrumentation

Link

http://xplorestaging.ieee.org/ielx5/58/6305991/06306015.pdf?arnumber=6306015

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The frequency dependence of electromechanical behaviors of columnar-grained BaTiO3 nanofilms;Physics Letters A;2020-04

2. Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films;Journal of Micromechanics and Microengineering;2020-01-30

3. Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT);Journal of Micromechanics and Microengineering;2015-01-30

4. Non-linear behaviors of carbon nanotubes under electrostatic actuation based on strain gradient theory;International Journal of Non-Linear Mechanics;2014-12

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