Direct and all-dry microfabrication of ultramicroelectrode based on cold atmospheric microplasma jet**-Reference-Cited by-同舟云学术

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Direct and all-dry microfabrication of ultramicroelectrode based on cold atmospheric microplasma jet**

Published:2021-04-25 Issue: Volume: Page:
ISSN:
Container-title:2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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Author:

Xi Y.,Wang L.C.,Guo Z.J.,Yang B.,Liu J. Q.

Funder

National Key R&D Program of China

National Natural Science Foundation of China

Program of Shanghai Academic/Technology Research Leader

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9451202/9451223/09451285.pdf?arnumber=9451285

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Diamond-Like-Carbon Coated Ultramicroelectrode with Contrallable Exposed Length Based on Microplasma Jet;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

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