P5I-4 Diamond Saw Resonators With SiO2/ZnO/IDT/ZnO/Diamond Structure
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Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/4409572/4409573/04410168.pdf?arnumber=4410168
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fabrication of a 3GHz oscillator based on Nano-Carbon-Diamond-film-based guided wave resonators;Microelectronic Engineering;2013-12
2. Influence of substrate crystallography on the room temperature synthesis of AlN thin films by reactive sputtering;Applied Surface Science;2011-09
3. High-frequency surface acoustic wave filter based on diamond thin film;physica status solidi (a);2011-03-16
4. Effect of substrate–target distance and sputtering pressure in the synthesis of AlN thin films;Microsystem Technologies;2011-01-07
5. Development of a 6GHz resonator by using an AlN diamond structure;2008 IEEE Ultrasonics Symposium;2008-11
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