A new miniaturized surface micromachined tunneling accelerometer-Reference-Cited by-同舟云学术

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A new miniaturized surface micromachined tunneling accelerometer

Published:1996-06 Issue:6 Volume:17 Page:306-308
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Kubena R.L.,Atkinson G.M.,Robinson W.P.,Stratton F.P.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx1/55/10859/00496466.pdf?arnumber=496466

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