Author:
Huhtinen M.,Orava R.,Pimia M.,Tuuva T.,Ylostalo J.,Osterberg K.,Eranen S.,Leinonen K.,Hietanen I.,Turchetta R.,Schaeffer M.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Nuclear Energy and Engineering,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Patterning large-area devices with a 5:1 reduction stepper;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2005-12
2. Silicon beam telescope for CMS detector tests;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;1999-07
3. Semiconductor particle tracking detectors;Reports on Progress in Physics;1994-05-01