Advanced Surface Acoustic Wave Resonators on LiTaO₃/SiO₂/Sapphire Substrate-Reference-Cited by-同舟云学术

Advanced Surface Acoustic Wave Resonators on LiTaO₃/SiO₂/Sapphire Substrate

Published:2022-10 Issue:10 Volume:43 Page:1748-1751
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Wu Jinbo¹^ORCID,Zhang Shibin²^ORCID,Chen Yang³,Zheng Pengcheng³,Zhang Liping³^ORCID,Yao Hulin³,Li Zhongxu³,Zhao Xiaomeng²,Huang Kai²,Wu Tao⁴^ORCID,Ou Xin³^ORCID

Affiliation:

1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Shanghai, China

2. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China

3. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China

4. School of Information Science and Technology (SIST), ShanghaiTech University, Shanghai, China

Funder

National Key Research and Development Program of China

Shanghai Post-Doctoral Excellence Program

Fellowship of China Postdoctoral Science Foundation

National Natural Science Foundation of China

Frontier Science Key Program of the Chinese Academy of Sciences

Chinese-Austrian Cooperative Research and Development Project

Program of Shanghai Academic Research Leader

K. C. Wong Education Foundation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/55/9903996/09863870.pdf?arnumber=9863870

Reference34 articles.

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2. Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering

3. Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study

4. Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study

5. Spurious Free SAW Resonators on Layered Substrate with Ultra-High Q, High Coupling and Small TCF

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