1. Department of Microelectronic Science and Engineering, School of Physical Science and Technology, Ningbo University, Ningbo, China
2. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
3. Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement, Centre for Quantum Physics, School of Physics, Beijing Institute of Technology, Beijing, China
4. School of Physical Science and Technology, Lanzhou University, Lanzhou, China