Thick Film Ultrasonic Micromotor Based on Chemical Mechanical Thinning and Polishing Process-Reference-Cited by-同舟云学术

Thick Film Ultrasonic Micromotor Based on Chemical Mechanical Thinning and Polishing Process

Published:2022-09 Issue:9 Volume:43 Page:1547-1550
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Zhang Pinbao¹^ORCID,Niu Jiaqi¹,Zhang Xin¹,Mao Shunming²,Liu Jingquan¹^ORCID,Yang Bin¹^ORCID

Affiliation:

1. Department of Micro/Nano Electronics, National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Shanghai Jiao Tong University, Shanghai, China

2. Shanghai NCC Electronic Company Ltd., Shanghai, China

Funder

National Natural Science Foundation of China

Medicine and Engineering Interdisciplinary Research Fund of Shanghai Jiao Tong University

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/55/9866921/09845417.pdf?arnumber=9845417

Reference21 articles.

1. Ultrasonic micro-motor with multilayer piezoelectric ceramic and chamfered driving tips

2. A standing wave ultrasonic stepping motor using open-loop control system

3. A review on piezoelectric ultrasonic motors for the past decade: Classification, operating principle, performance, and future work perspectives

4. Mechanical and energetic characteristics of an energy harvesting type piezoelectric ultrasonic actuator

5. Development of a Rotary Ultrasonic Motor with Double-Sided Staggered Teeth

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