An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator-Reference-Cited by-同舟云学术

An Improved SOI-on-Glass Fabrication Method of Large-Area Sheeting of MEMS Isolator

Published:2023-05-14 Issue: Volume: Page:
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Container-title:2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
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Author:

Ran Longqi¹,Wu Yichuan¹,He Jiangbo²,Cao Binlei¹,Hu Zongda³,Zhou Wu¹

Affiliation:

1. University of Electronic Science and Technology of China,School of Mechanical and Electrical Engineering,Chengdu,China

2. Xihua University,School of Mechanical Engineering,Chengdu,China

3. Advanced Research Centre AVIC Chengdu CAIC Electronics CO., LTD,Chengdu,China

Funder

National Natural Science Foundation of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10190845/10190847/10190975.pdf?arnumber=10190975

Reference13 articles.

1. MEMS at Bosch – Si plasma etch success story, history, applications, and products

2. Variations in Micromachined Isolator Geometries for Sensor Performance in Harsh Environments

3. Design, Fabrication and Experimental Validation of a Metaplate for Vibration Isolation in MEMS

4. Design and simulation of MEMS thermal and vibration isolator based on PDMS beam arrays;xu;IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),2010

5. A large-scale microelectromechanical-systems-based silicon photonics LiDAR

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