Miniaturized Ruthenium Oxide Cryogenic Temperature Sensor Based on MEMS Technology-Reference-Cited by-同舟云学术

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Miniaturized Ruthenium Oxide Cryogenic Temperature Sensor Based on MEMS Technology

Published:2024-01-21 Issue: Volume: Page:991-994
ISSN:
Container-title:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Zhu Kanglai¹,You Minmin¹,Ran Yongpeng¹,Shen Yudong¹,Yang Bin¹,Liu Jingquan¹

Affiliation:

1. Shanghai Jiao Tong University,National Key Laboratory of Advanced Micro and Nano Manufacture Technology,Shanghai,China,200240

Funder

Fundamental Research Funds for the Central Universities

Chinese Academy of Sciences

National Natural Science Foundation of China

Shanghai Jiao Tong University

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439551.pdf?arnumber=10439551

Reference15 articles.

1. On-and-off chip cooling of a Coulomb blockade thermometer down to 2.8 mK

2. Experimental and numerical study of a condensation-driven dilution refrigerator

3. Numerical simulation of multiprobe cryoablation synergy using heat source boundary

4. Cryoablation or Drug Therapy for Initial Treatment of Atrial Fibrillation

5. Evolution of High-Temperature Superconductivity from a Low-TcPhase Tuned by Carrier Concentration in FeSe Thin Flakes

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