Micro-Transfer Printing of Photoresist Using Adhesion- Switchable Stamp for Patterning Unconventional Surface-Reference-Cited by-同舟云学术

Micro-Transfer Printing of Photoresist Using Adhesion- Switchable Stamp for Patterning Unconventional Surface

Published:2024-01-21 Issue: Volume: Page:
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Container-title:2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Guo Qinhua¹,Zhang Jingyang¹,Shu Xin¹,Zhang Jiajun¹,Chen Qingming²,Zhang Shengdong³,Wang Yunda¹

Affiliation:

1. The Hong Kong University of Science and Technology (Guangzhou),Smart Manufacturing Thrust,Guangzhou,China

2. Sun Yat-sen University,School of Microelectronics Science and Technology,Zhuhai,China

3. Peking University,School of Integrated Circuits,China

Funder

National Natural Science Foundation of China

Publisher

IEEE

Link

Reference10 articles.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Sharp Phase Transition Shape Memory Polymer for Micro-transfer Printing;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02

2. Selective Micro-Transfer Printing of Microspheres Using Adhesion-Switchable Stamp;2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS);2024-05-02