A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot
Author:
Affiliation:
1. KU Leuven,Department of Electrical Engineering (ESAT)-MNS,Leuven,Belgium,3001
2. Northwestern Polytechnical University,The MOE Key Laboratory of Micro and Nano Systems for Aerospace,Xian,China,710072
Funder
KU Leuven
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10439241/10439292/10439469.pdf?arnumber=10439469
Reference14 articles.
1. Investigation of position detectors for atomic force microscopes
2. Effect of the glass-transition temperature of latexes on drying-stress development of latex films and inkjet coating layers
3. Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement
4. A high-sensitivity MEMS gravimeter with a large dynamic range
5. Graphene–aluminum nitride NEMS resonant infrared detector
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